| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma radiation antenna with good radiation efficiency of the microwave, a wave guide and a plasma treatment device using it. <P>SOLUTION: A treatment container storing a substrate to be treated inside, an electromagnetic wave generating part generating an electromagnetic wave for plasma enhancement, an antenna radiating the electromagnetic wave to the treatment container and generating the plasma and a wave guide guiding the electromagnetic wave generated by an electromagnetic wave generator to the antenna are provided. In the antenna, a power feeding part to guide in power from the wave guide and a plurality of slots formed on a surface opposite to the power feeding part are formed. Furthermore, the power feeding part is formed in a position shortening the travelling distance of the electromagnetic wave which is travelled inside the antenna. Then, the electromagnetic wave is radiated inside the treatment container from the slots in the antenna. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
