| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow rate switch which can accurately output ON/OFF of attraction without sequential correction even when a pressure switch is changed to the flow rate switch. <P>SOLUTION: After the present flow rate value detected with a flow rate sensing unit 21 has exceeded the preset flow rate value with a microcomputer 24 provided in the flow rate switch 13 (S3: YES), a flow rate value is updated (S4). When the updated flow rate value becomes lower than the preset flow rate value (S5: YES), the switch signal "ON" is outputted upon judgment that a work 16 is attracted by an attraction nozzle 11 (S6). <P>COPYRIGHT: (C)2005,JPO&NCIPI |
