| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily manufacture an antireflection film having small average reflectivity and proper optical characteristics by improving its productivity. <P>SOLUTION: In the antireflection film, formed by laminating one or more layers of metal oxide thin films on a base material film, at least one metal oxide thin-film layer formed by bringing a gaseous component, composed of a metal compound having hydrolyzability into reaction with the moisture vapor generated from the base material film is used. In the antireflection film, formed by laminating ≥3 layers including a low-refractive index layer, a middle-refractive index layer and a high-refractive index layer on the base material film, the metal oxide thin-film layer formed by bringing the gaseous component, composed of the metal compound having the hydrolyzability into reaction with the moisture vapor generated from the base material film is used as an intermediate-refractive index layer. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
