SEMICONDUCTOR WAFER INSPECTION SYSTEM CAPABLE OF CONTROLLING ACCURATELY REFLECTING ANGLE OF WAFER BY USING ELECTRONIC DEVICE,申请号KR19970046633-传众专利搜索

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发明名称	SEMICONDUCTOR WAFER INSPECTION SYSTEM CAPABLE OF CONTROLLING ACCURATELY REFLECTING ANGLE OF WAFER BY USING ELECTRONIC DEVICE
摘要
申请公布号	KR100481074(B1)	申请公布日期	2005.03.25
申请号	KR19970046633	申请日期	1997.09.10
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	SHIN, YEON GYEONG;WOO, CHANG U;KIM, HUI DEOK
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
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