发明名称 Floating resurf LDMOSFET and method of manufacturing same
摘要 A semiconductor component includes a RESURF transistor ( 100, 200, 300, 400, 500 ) that includes a first semiconductor region ( 110, 210, 310, 410, 510 ) having a first conductivity type and an electrically-floating semiconductor region ( 115, 215, 315, 415, 515, 545 ) having a second conductivity type located above the first semiconductor region. The RESURF transistor further includes a second semiconductor region ( 120, 220, 320, 420, 520 ) having the first conductivity type located above the electrically-floating semiconductor region, a third semiconductor region ( 130, 230 ) having the first conductivity type located above the second semiconductor region, and a fourth semiconductor region ( 140, 240, 340, 440, 540 ) having the second conductivity type located above the second semiconductor region. In a particular embodiment, the fourth semiconductor region and the electrically-floating semiconductor region deplete the second semiconductor region when a reverse bias is applied between the third semiconductor region and the fourth semiconductor region.
申请公布号 US6882023(B2) 申请公布日期 2005.04.19
申请号 US20020286169 申请日期 2002.10.31
申请人 MOTOROLA, INC. 发明人 KHEMKA VISHNU;PARTHASARATHY VIJAY;ZHU RONGHUA;BOSE AMITAVA
分类号 H01L29/06;H01L29/10;H01L29/78;(IPC1-7):H01L21/336 主分类号 H01L29/06
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