APPARATUS FOR MECHANICAL CLAMP OF AN ION IMPLANT EQUIPMENT,申请号KR20030006782-传众专利搜索

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发明名称	APPARATUS FOR MECHANICAL CLAMP OF AN ION IMPLANT EQUIPMENT
摘要
申请公布号	KR100484858(B1)	申请公布日期	2005.04.22
申请号	KR20030006782	申请日期	2003.02.04
申请人		发明人
分类号	H01L21/265;(IPC1-7):H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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