Piezoelectric liquid-jet head having a superconductor layer

摘要

A piezoelectric liquid-jet head apparatus, which provides a nearly uniform piezoelectric element and enables ejection of liquid at maximum output, is disclosed. The piezoelectric liquid-jet head has a piezoelectric element 300 provided on one surface of a passage forming substrate 10 via a vibration plate. The piezoelectric liquid jet head includes: a zirconium oxide layer 101 formed on the surface of the passage forming substrate 10; a cerium oxide layer 102 formed on the zirconium oxide layer 101; a superconductor layer 103 formed on the cerium oxide layer 102 and composed of a yttrium-barium-copper-oxygen-based material (YBCO); a lower electrode 60 formed on the superconductor layer 103 and composed of strontium ruthenate; and a piezoelectric layer 70 which is a single crystal epitaxially grown on the lower electrode 60.