发明名称 |
Fluorescent X-ray analysis apparatus |
摘要 |
A fluorescent X-ray analysis apparatus includes: an X-ray generation source for radiating a beam of primary X-rays; spectroscopic elements circularly arranged so that their inner surfaces describe a circle centered on an optical axis of the beam of primary X-rays for monochromatizing the beam of primary X-rays and condensing the beam on a surface of an irradiation object; a spectroscopic element position adjuster for adjusting the positions of the spectroscopic elements; secondary X-rays detector for detecting secondary X-rays radiated from the surface of the irradiation object irradiated with the monochromatized beam of primary X-rays; a secondary X-ray detector position adjuster adjusting the position of the secondary X-ray detector; an irradiation object surface position detector detecting the position of the surface of the irradiation object; and a controller adjusting the positions of the spectroscopic elements through the spectroscopic element position adjuster to condense the monochromatized beam of primary X-rays on the surface of the irradiation object, on the basis of the position of the surface of the irradiation object detected by the irradiation object surface position detector.
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申请公布号 |
US6885726(B2) |
申请公布日期 |
2005.04.26 |
申请号 |
US20030419964 |
申请日期 |
2003.04.22 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
UEHARA YASUSHI;SHIBANO TERUO |
分类号 |
G01N23/223;G21K1/06;(IPC1-7):G01N23/223 |
主分类号 |
G01N23/223 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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