Piezoelectric resonator device

摘要

A piezoelectric resonator device having a sandwich structure is provided, which can avoid gas generation with reduced size or height. A crystal resonator includes a crystal resonator plate, a first sealing member and a second sealing member. A sealing-member-side first bonding pattern and a sealing-member-side second bonding pattern, both to be bonded to the crystal resonator plate, are formed respectively on the first and second sealing members. On the crystal resonator plate, a resonator-plate-side first bonding pattern to be bonded to the first sealing member is formed on a first main surface and a resonator-plate-side second bonding pattern to be bonded to the second sealing member is formed on a second main surface. The sealing-member-side first bonding pattern is bonded to the resonator-plate-side first bonding pattern, and the sealing-member-side second bonding pattern is bonded to the resonator-plate-side second bonding pattern, both by diffusion bonding.

主权项

1. A piezoelectric resonator device, comprising:
a piezoelectric resonator plate including a first excitation electrode formed on a first main surface of a substrate, and a second excitation electrode formed on a second main surface of the substrate, the second excitation electrode making a pair with the first excitation electrode;
a first sealing member covering the first excitation electrode of the piezoelectric resonator plate;a second sealing member covering the second excitation electrode of the piezoelectric resonator plate, the second sealing member including external terminals to be electrically connected to an outside;an internal space formed by bonding the first sealing member to the piezoelectric resonator plate and by bonding the second sealing member to the piezoelectric resonator plate, the internal space hermetically sealing an vibrating part including the first excitation electrode and the second excitation electrode of the piezoelectric resonator plate;a resonator-plate-side first bonding pattern formed on the first main surface of the piezoelectric resonator plate so as to be bonded to the first sealing member, the resonator-plate-side first bonding pattern being constituted by a base PVD film deposited on the first main surface by physical vapor deposition and an electrode PVD film deposited on the base PVD film by the physical vapor deposition;a resonator-plate-side second bonding pattern formed on the second main surface of the piezoelectric resonator plate so as to be bonded to the second sealing member, the resonator-plate-side second bonding pattern being constituted by a base PVD film deposited on the second main surface by the physical vapor deposition and an electrode PVD film deposited on the base PVD film by the physical vapor deposition;a sealing-member-side first bonding pattern formed on the first sealing member so as to be bonded to the piezoelectric resonator plate, the sealing-member-side first bonding pattern being constituted by a base PVD film deposited on the first sealing member by the physical vapor deposition and an electrode PVD film deposited on the base PVD film by the physical vapor deposition; anda sealing-member-side second bonding pattern formed on the second sealing member so as to be bonded to the piezoelectric resonator plate, the sealing-member-side second bonding pattern being constituted by a base PVD film deposited on the second sealing member by the physical vapor deposition and an electrode PVD film deposited on the base PVD film by the physical vapor deposition,wherein the sealing-member-side first bonding pattern is bonded to the resonator-plate-side first bonding pattern by diffusion bonding, and the sealing-member-side second bonding pattern is bonded to the resonator-plate-side second bonding pattern by the diffusion bonding.