发明名称 Semiconductor device having a fuse
摘要 A fuse used for redundancy function in a semiconductor device includes a pair of fuse terminals formed as a common layer with top interconnect lines by using a damascene technique, and a fuse element made of refractive metal and bridging the fuse terminals. The fuse element is formed as a common layer with the protective cover films covering the interconnect lines.
申请公布号 US6914319(B2) 申请公布日期 2005.07.05
申请号 US20030660168 申请日期 2003.09.11
申请人 NEC ELECTRONICS CORPORATION 发明人 OKADA NORIO
分类号 H01L21/3205;H01L21/82;H01L23/52;H01L23/525;H01L23/62;H01L27/02;H01L27/105;H01L29/00;(IPC1-7):H01L29/00 主分类号 H01L21/3205
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