发明名称 |
Semiconductor device having a fuse |
摘要 |
A fuse used for redundancy function in a semiconductor device includes a pair of fuse terminals formed as a common layer with top interconnect lines by using a damascene technique, and a fuse element made of refractive metal and bridging the fuse terminals. The fuse element is formed as a common layer with the protective cover films covering the interconnect lines.
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申请公布号 |
US6914319(B2) |
申请公布日期 |
2005.07.05 |
申请号 |
US20030660168 |
申请日期 |
2003.09.11 |
申请人 |
NEC ELECTRONICS CORPORATION |
发明人 |
OKADA NORIO |
分类号 |
H01L21/3205;H01L21/82;H01L23/52;H01L23/525;H01L23/62;H01L27/02;H01L27/105;H01L29/00;(IPC1-7):H01L29/00 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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