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发明名称
EQUIPMENT FOR SOFT BAKE
摘要
申请公布号
KR20050073655(A)
申请公布日期
2005.07.18
申请号
KR20040001494
申请日期
2004.01.09
申请人
BOE HYDIS TECHNOLOGY CO., LTD.
发明人
CHOI, SEUNG JIN;CHOI, HYUN MOOK;KIM, KI YONG;JUNG, BONG KWAN
分类号
H01L21/324;(IPC1-7):H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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