| 摘要 |
<P>PROBLEM TO BE SOLVED: To make it possible to make the whole of equipment compact by making an offgas tank unnecessary and effectively making a PSA (pressure swing adsorption) mechanism smaller. <P>SOLUTION: The PSA mechanism 48 is equipped with adsorption columns 60a, 60b and 60c, and one ends of respective columns 60a, 60b and 60c are connected to an offgas discharge line 68 through valves 66a, 66b and 66c, and the offgas discharge line 68 is connected to an offgas ejector 74 constituting an offgas supply part 72. The offgas ejector 74 has a function to suck the offgas from the PSA mechanism 48 with a compressed air flowing from an offgas discharging air supply line 36 to an offgas flowing line 76 by an air compressor. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
