发明名称 COVER BODY DEVICE AND VACUUM VESSEL DEVICE
摘要 A cover body device for opening and closing an opening (12) formed in a main body (8) includes a cover body (14) having an acting face and a back face opposite. The cover body (14) is attached by an arm (24) so as to be openable/closable with respect to the main body (8). The arm (24) has a first shaft (26) rotatably supporting the arm (24) at the main body (8) at the circumference of the opening (12) and a second shaft (34) swingably supporting the cover body (14) at the arm (24) through the back face. The second shaft (34) is provided between the gravity center (C1) of the cover body (14) and the first shaft (26). A regulating member (50) is provided such that, in a regulating position between the first and second shafts (26, 34), it is interposed between the arm (24) and the back face of the cover body (14). In order that the acting face of the cover body (14) is parallel to the opening (12), the regulating member (50) regulates the distance in the regulating position between the arm (24) and the back face of the cover body (14).
申请公布号 KR20050084354(A) 申请公布日期 2005.08.26
申请号 KR20057011123 申请日期 2005.06.16
申请人 TOKYO ELECTRON LIMITED;NHK SPRING CO., LTD. 发明人 KIMURA TORU;NARUSHIMA HIROSHI;HIROKI TSUTOMU
分类号 H01L21/205;F16J13/18;F16J13/20;(IPC1-7):F16J13/18 主分类号 H01L21/205
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