| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect the film thickness unevenness of a coating film applied by a so-called spinless coater-type coating device. <P>SOLUTION: The device is provided with a delivery head 104 moving in the x direction while delivering a coating solution 106 from a delivery outlet 104a extended in the y direction, a film thickness measuring device 109 for measuring the thickness of the coating film 108 formed on the opposed surface of a substrate 102 along the y direction, a judging device 110 for judging whether or not the thickness characteristics in the y direction all range within a predetermined scope with respect to the thickness average value, and an alarm 111 for giving an alarm when the device judges that there exists an unranging portion. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
