| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generator and a low-vacuum scanning electron microscope which are compact, seldom affected by noises and not influenced by light due to plasma generation on an image detecting system. <P>SOLUTION: The plasma generator has a cylindrical shape and comprises a quartz tube 60 in which a gas for ionization passes, a high frequency coil 63 wound around the end of the quartz tube 60, a mold 65 which covers around the quartz tube 60 and the high frequency coil 63, a metal 66 which covers a whole torch and up to around the plasma exit aperture, and an antireflection film 67 prepared inside the metal part 66 in the cylinder. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
