发明名称 Foil leak detection chamber
摘要 The invention relates to a chamber for the detection of leaks on foils ( 1 ). Said chamber comprises two frames ( 2, 3 ) which are connected together in an articulated manner, foils ( 4, 5 ) which are mounted on said frames, a test chamber ( 8 ) composed of the foils, a seal ( 12, 13, 18 ) arranged between the frames and at least one bore hole ( 7 ), preferably several bore holes, in at least one of the two frames ( 2, 3 ), which can be connected to the inlet of a vacuum pump ( 15, 16, 22 ). In order to improve the chamber's closing features, said chamber comprises an edge zone ( 14 ) wherein a vacuum can be created independently of the test chamber ( 8 ) and into which said bore holes ( 7 ) open out.
申请公布号 US6955076(B1) 申请公布日期 2005.10.18
申请号 US20020031876 申请日期 2002.01.24
申请人 LEYBOLD VAKUUM GMBH 发明人 WIDT RUDI;ABELEN THOMAS
分类号 G01M3/26;G01M3/22;G01M3/32;(IPC1-7):G01M3/22 主分类号 G01M3/26
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