| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light source device enabling to obtain an exposure device with excellent light exposure performance by irradiating an optimal position of a target with a laser and maintaining a position of the condensing point of generated light in a specified position, and to provide an exposure device having the light source device. <P>SOLUTION: This light source device generating plasma by irradiating the target with laser beam and taking out the light emitted by the plasma has a first detection means detecting the position of the target, an adjustment means adjusting the position of the condensing point of the laser beam, and a first control part controlling the adjustment means so that the position of the target detected by the first detection means coincides with the condensing point of the laser beam. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
