发明名称 Semiconductor device comprising transistors having control gates and floating gate electrodes
摘要 The semiconductor device comprises a first well 14 of a first conduction type formed in a semiconductor substrate 10 ; a second well 16 of a second conduction type formed in the first well 14 ; and a transistor 40 including a control gate 18 formed of an impurity region of the first conduction type formed in the second well 16 , a first impurity diffused layer 26 and a second impurity diffused layer 33 formed with a channel region 25 therebetween, and a floating gate electrode 20 formed on the channel region 25 and the control gate 18 with a gate insulation film 24 therebetween. The control gate 18 is buried in the semiconductor substrate 10 , which makes it unnecessary to form the control gate 18 on the floating gate electrode 20 . Thus, the memory transistor and the other transistors, etc. can be formed by the same fabricating process. Thus, the fabrication processes can be less and the semiconductor device can be inexpensive.
申请公布号 US6977411(B2) 申请公布日期 2005.12.20
申请号 US20030738025 申请日期 2003.12.18
申请人 FUJITSU LIMITED 发明人 ITO MASAKI;KATAYAMA MASAYA;FURUYAMA TAKAAKI;KAWABATA SHOZO
分类号 H01L27/10;H01L21/336;H01L21/8247;H01L27/115;H01L29/423;H01L29/788;H01L29/792;(IPC1-7):H01L29/788;H01L29/76 主分类号 H01L27/10
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