| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for precisely terminating a diamond electrode 42 by a desired atom to obtain the diamond electrode 42 having a more complete terminal surface. <P>SOLUTION: The termination method of the diamond electrode includes a rare gas terminating process for sputtering the surface of the diamond electrode 42, which is terminated by hydrogen, by a rare gas to terminate the diamond electrode 42 by the rare gas and a target substance terminating process for replacing the rare gas on the surface of the diamond electrode 42 with a target substance to terminate the diamond electrode 42. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
