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发明名称
于分时多工蚀刻过程中减少与深宽比有关之蚀刻的方法和设备
摘要
本发明提供一种减少与深宽比有关之蚀刻的方法和设备,其系在经由交错沉积/蚀刻制程而于半导体基板中电浆蚀刻深沟渠时所观察到的结果。于该交错沉积/蚀刻制程期间会即时地监控该基板上复数个不同大小的特征图形。接着,会依据从该监控中所收到的资讯来调整该交错沉积/蚀刻制程中的至少其中一项制程参数,用以达到该基板上至少两个不同大小特征图形有相同蚀刻深度的目的。
申请公布号
TW200607017
申请公布日期
2006.02.16
申请号
TW094121423
申请日期
2005.06.27
申请人
尤那西斯公司
发明人
赖守亮;卢歇尔 威斯特曼;大卫J 强森
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
林镒珠
主权项
地址
美国
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