| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a carbon dioxide gas sensor, which can manufacture the carbon dioxide gas sensor having sufficiently suppressed variations in its output properties and being capable of executing its operation with a short start time. <P>SOLUTION: The method of manufacturing the carbon dioxide made up such that a detection electrode 20 with a detection layer 22 and a counter electrode 30 are formed on a substrate 10 including a solid electrolyte, comprises: a carbonate particle producing step for removing water from a solution dissolving at least one kind of metallic ion selected from alkali metals and alkaline-earth metals and for producing a carbonate particle including carbonate of the above metal; a mixed liquid layer forming step for forming a mixed liquid layer which is composed of the carbonate particle and a mixed liquid including a solvent, on the substrate 10; a detection layer forming step for removing the solvent from the mixed liquid layer and for forming the detection layer 22 including the carbonate particle; and a counter electrode forming step for forming the counter electrode 30 on the substrate 10. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
