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发明名称
EQUIPMENT FOR REMOVING ENVIRONMENTAL PARTICLES AND METHOD THEREOF
摘要
申请公布号
KR20060029920(A)
申请公布日期
2006.04.07
申请号
KR20040078785
申请日期
2004.10.04
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
JIN, HYUNG KYU
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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