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发明名称
MONITORING DEVICE AND METHOD FOR POLISHING PAD ON THE CHEMICAL MECHANICAL POLISHING SYSTEM
摘要
申请公布号
KR20060074493(A)
申请公布日期
2006.07.03
申请号
KR20040113246
申请日期
2004.12.27
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
KIM, DAE YOUNG
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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