APPARATUS FOR CONTROLLING TEMPERATURE OF EACH SEPARATED AREA OF ELECTRO STATIC CHUCK IN A SEMICONDUCTOR DRY ETCHING EQUIPMENT,申请号KR20040113292-传众专利搜索

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发明名称	APPARATUS FOR CONTROLLING TEMPERATURE OF EACH SEPARATED AREA OF ELECTRO STATIC CHUCK IN A SEMICONDUCTOR DRY ETCHING EQUIPMENT
摘要
申请公布号	KR20060074536(A)	申请公布日期	2006.07.03
申请号	KR20040113292	申请日期	2004.12.27
申请人	DONGBU ELECTRONICS CO., LTD.	发明人	HA, SEUNG CHUL
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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