发明名称 |
XY STAGE |
摘要 |
An XY stage two-dimensionally controlling the positions of slider parts on a lattice platen, comprising the plurality of slider parts controllably positioned independent of each other. Each of the plurality of slider parts comprises a position control part controlling the positions of the slider parts in X-and Y-directions and a yawing correction part correcting the yawing of the slider parts around a Z-axis.
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申请公布号 |
KR20070104611(A) |
申请公布日期 |
2007.10.26 |
申请号 |
KR20077018947 |
申请日期 |
2006.02.16 |
申请人 |
YOKOGAWA ELECTRIC CORPORATION |
发明人 |
NIKAIDO MITSUHIRO;KOIZUMI YUTAKA;KAIHO FUMIO |
分类号 |
H01L21/66;G01R31/26;H01L21/683 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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