发明名称
摘要 A semiconductor device production process includes forming, on a prepared SOI wafer, semiconductor functional devices and substrate contacts. The substrate contacts connect to a support substrate of the SOI wafer. The semiconductor device production process also includes forming a pattern that connects the substrate contacts to external connection pads formed on the semiconductor functional devices such that the external connection pads are not connected to each other. The semiconductor device production process also includes measuring conductivity between the external connection pads.
申请公布号 JP4299349(B2) 申请公布日期 2009.07.22
申请号 JP20070087400 申请日期 2007.03.29
申请人 发明人
分类号 H01L29/786;H01L21/3205;H01L23/52 主分类号 H01L29/786
代理机构 代理人
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