FIXING UNIT, POLISHING APPARATUS HAVING THE FIXING UNIT, METHOD OF PLANARIZING A COATING LAYER, AND METHOD OF MANUFACTURING A SUPPORTING APPARATUS USING THE POLISHING APPARATUS

摘要

A fixing unit, polishing apparatus having the fixing unit, method of planarizing a coating layer, and method of manufacturing a supporting apparatus using the polishing apparatus are provided to secure the planarity of the coating layer by sticking the base material to the base plate. The polishing device(100) comprises the fixing unit(110) and polishing unit(120). The fixing unit comprises the base plate(112), and the supporting member(114) and fastening screw(116). The supporting member supports the base plate. The fastening screw screws the base plate and substrate support. The polishing unit is prepared in the upward of the fixing unit to polish the coating layer(24).