发明名称 |
Method and apparatus for forming a thin-film solar cell using a continuous process |
摘要 |
The present invention relates to new methods for manufacturing photovoltaic devices and an apparatus for practicing those methods of manufacture. The present invention employs a transfer-through system for advancing work piece substrates through an integrated apparatus of multiple treatment chambers that control each of the manufacturing processes.
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申请公布号 |
US7576017(B2) |
申请公布日期 |
2009.08.18 |
申请号 |
US20050271583 |
申请日期 |
2005.11.10 |
申请人 |
DAYSTAR TECHNOLOGIES, INC. |
发明人 |
TUTTLE JOHN R. |
分类号 |
H01L21/00;C23C16/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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