Device for Monitoring the Alignment of a Laser Beam, and EUV Radiation Generating Apparatus having such a Device

摘要

This disclosure relates to a device for monitoring the alignment of a laser beam, comprising: a detector having an opening for passage of the laser beam, at least two temperature sensors which are mounted on the detector, and a temperature monitoring device which is connected to the at least two temperature sensors, for monitoring the alignment of the laser beam relative to the opening. The at least two temperature sensors have a temperature-dependent resistance which either increases as the temperature increases or decreases as the temperature increases, and the at least two temperature sensors are connected in series with the temperature monitoring device. This disclosure relates also to an EUV radiation generating apparatus which has at least one device as described above for monitoring the alignment of a laser beam.

主权项

1. A system for monitoring the alignment of a laser beam, the system comprising:
a detector defining an opening for passage of the laser beam; a plurality of temperature sensors mounted on the detector; and a temperature monitoring device connected to the plurality of temperature sensors, wherein the temperature monitoring device is configured to monitor the alignment of the laser beam relative to the opening, wherein each temperature sensor of the plurality of temperature sensors has a temperature-dependent resistance that either increases as a temperature of the temperature sensor increases or decreases as the temperature of the temperature sensor increases, and wherein the plurality of temperature sensors are connected in series with the temperature monitoring device.