Integration of millimeter wave antennas on microelectronic substrates

摘要

A high performance antenna incorporated on a microelectronic substrate by forming low-loss dielectric material structures in the microelectronic substrates and forming the antenna on the low-loss dielectric material structures. The low-loss dielectric material structures may be fabricated by forming a cavity in a build-up layer of the microelectronic substrate and filling the cavity with a low-loss dielectric material.

主权项

1. A microelectronic structure, comprising:
a microelectronic substrate comprising a substrate core having a first build-up layer on a first surface thereof; a low-loss dielectric material structure formed through the first build-up layer and at least partially into the substrate core of the microelectronic substrate; and an antenna disposed on the low-loss dielectric material structure.