| 发明名称 |
WAFER BOAT, ANNEALING TOOL AND ANNEALING METHOD |
| 摘要 |
A wafer boat includes a base, a plurality of support rods and a plurality of cantilever arms. The support rods are carried by the base. The support rods are disposed around a space above the base. The cantilever arms are carried by the support rods. At least two of the cantilever arms carried by at least one of the support rods are vertically spaced apart to define at least one slot for a wafer. |
| 申请公布号 |
US2017110353(A1) |
申请公布日期 |
2017.04.20 |
| 申请号 |
US201514918071 |
申请日期 |
2015.10.20 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
CHAO Ho-Cheng;CHEN Shun-Chin;WANG Shao-Hua;CHEN Shih-Fang |
| 分类号 |
H01L21/673;H01L21/324;H01L21/67 |
主分类号 |
H01L21/673 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A wafer boat, comprising:
a base; a plurality of support rods carried by the base, the support rods being disposed around a space above the base; and a plurality of cantilever arms carried by the support rods, wherein at least two of the cantilever arms carried by at least one of the support rods are vertically spaced apart to define at least one slot for a wafer. |
| 地址 |
Hsinchu TW |
