| 摘要 |
Polycrystalline silicon having a low P, B, and other extraneous element contamination is produced by performing at least one process step in a cleanroom of class 1 to 100,000, wherein air is conducted into the cleanroom through at least one filter for separating particles ≧1 μm, and one filter for particles <1 μm, the filters being made of low contamination materials. |
