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发明名称
COMPOSITION FOR POLISHING SILICON WAFERS
摘要
본 발명은 실리콘 웨이퍼 표면의 헤이즈 저감 효과에 우수한 실리콘 웨이퍼 연마용 조성물을 제공한다. 여기서 제공되는 실리콘 웨이퍼 연마용 조성물은 지립과, 실리콘 웨이퍼 연마 촉진제와, 아미드기 함유 중합체와, 물을 함유한다. 또한, 아미드기 함유 중합체는 하기 일반식 (1)로 표시되는 단량체에서 유래되는 구성 단위 A를 주쇄에 갖는다. 또한, 지립의 평균 2차 입자 직경이 10nm 이상 60nm 이하이다.
申请公布号
KR20160119872(A)
申请公布日期
2016.10.14
申请号
KR20167027405
申请日期
2015.04.07
申请人
FUJIMI INCORPORATED
发明人
TSUCHIYA KOHSUKE;TANSHO HISANORI;MORI YOSHIO
分类号
H01L21/02;C09G1/02;C09K3/14;H01L21/304;H01L21/306;H01L21/3105
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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