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发明名称
VERFAHREN ZUM HERSTELLEN EINER METALLSILIZIDSCHICHT AUF EINER OBERFLAECHE EINES SILIZIUMKOERPERS
摘要
申请公布号
DE2360030(A1)
申请公布日期
1974.06.20
申请号
DE19732360030
申请日期
1973.12.01
申请人
RCA CORP., NEW YORK, N.Y. (V.ST.A.)
发明人
CHIANG, YUEN-SHENG, TRENTON, N.J. (V.ST.A.)
分类号
C01B33/06;H01L21/00;H01L21/306;H01L29/00;H01L29/47;H01L29/872;(IPC1-7):C23C3/00;H01L9/00;H01L11/14
主分类号
C01B33/06
代理机构
代理人
主权项
地址
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