APPARATUS FOR PRODUCING ION-FREE INSULATING LAYERS,申请号US19710200821-传众专利搜索

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发明名称	APPARATUS FOR PRODUCING ION-FREE INSULATING LAYERS
摘要
申请公布号	US3828722(A)	申请公布日期	1974.08.13
申请号	US19710200821	申请日期	1971.11.22
申请人	COGAR CORP,US	发明人	REUTER J,US;SANDHU J,US
分类号	C23C8/12;H01L21/316;(IPC1-7):C23C13/08	主分类号	C23C8/12
代理机构		代理人
主权项
地址

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