| 发明名称 |
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| 摘要 |
This invention relates to a scanning charged-particle microscope system, such as a scanning electron microscope system. More particularly, the invention relates to apparatus that is used in compensating for external interference with the charged particle beam. |
| 申请公布号 |
SE7409441(A) |
申请公布日期 |
1975.01.27 |
| 申请号 |
SE19740009441 |
申请日期 |
1974.07.19 |
| 申请人 |
AMERICAN OPTICAL CORPORATION |
发明人 |
COATES V J;WELTER L M;GOLD J J |
| 分类号 |
H01J37/22;H01J37/09;H01J37/24;H01J37/26;H01J37/28 |
主分类号 |
H01J37/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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