UV irradiation device for clocked operation

摘要

An irradiation device including at least one radiation source, which emits both UV-radiation and W-radiation, i.e. visible light and/or IR radiation. The device includes a transport device for delivering substrates to be irradiated. At least one wavelength-selective filter reflects UV-radiation at an angle of 45° and transmits W-radiation. Means for the absorption of IR radiation are arranged downstream of the optical filter in the propagation direction in the beam path of the W-radiation not deflected by the wavelength-selective filter. The means for the absorption of IR radiation are also designed to absorb visible light and UV rays, and the irradiation device includes movement means in order to guide the wavelength-selective filter into and out of the beam path of the radiation source.

主权项

1. Irradiation apparatus with
at least one radiation source, which emits UV-radiation as well as W-radiation, i.e. visible light and/or IR-radiation and, a transport arrangement for feeding substrates to be irradiated, and at least one wave-length selective filter, which reflects the UV-radiation and transmits W-radiation about an angle of 45°, means for absorbing of IR-radiation, located downstream of the optical filter, as considered in direction of propagation, in the ray-path of the W-radiation, not deflected by the wave-length selective filter, characterized by that the means for absorbing of IR-radiation are also tailored as means absorbing visible light and a predominant part of UV-radiation, and that the irradiation apparatus comprises moving means for moving the wave-length selective filter into and completely out of the ray-path of the radiation source.