LIQUID CRYSTAL DISPLAY AND MANUFACTURING METHOD THEREOF

摘要

A liquid crystal display device according to the present invention includes: a substrate; a gate line formed on the substrate and having a lower gate electrode; a first insulating film covering the gate line; a channel formed on the first insulating film and superposed on the lower gate electrode; an active member having a source electrode and a drain electrode positioned on both sides of the channel; a pixel electrode formed on the same layer as the active member; a second insulating film covering the active member and the pixel electrode; a data line formed on the second insulating film and connected to the active member; a protective film covering the data line; and a common electrode formed on the protective film and superposed on the pixel electrode. The active member and the pixel electrode are formed of an oxide semiconductor, and the first insulating film may be a silicon nitride film containing 10-35 atm% of fluorine atoms.