| 发明名称 |
MEMS DEVICE |
| 摘要 |
According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first electrode fixed on the substrate. The first electrode includes a first one end portion and a first other end portion. A capacitor insulating film is provided on the first electrode. An insulating film is provided on the substrate and located around a periphery of the first electrode. A second electrode is provided above the first electrode and movable. The second electrode includes a second one end portion corresponding to the first one end portion, and a second other end portion corresponding to the first other end portion. The second one end portion extends outside the first one end portion and includes a first bent portion bent downward. |
| 申请公布号 |
US2016272481(A1) |
申请公布日期 |
2016.09.22 |
| 申请号 |
US201615067110 |
申请日期 |
2016.03.10 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
YAMAZAKI Hiroaki;KURUI Yoshihiko;IKEHASHI Tamio |
| 分类号 |
B81B3/00 |
主分类号 |
B81B3/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS device comprising:
a substrate; a first electrode fixed on the substrate, and comprising a first one end portion and a first other end portion; a capacitor insulating film provided on the first electrode; an insulating film provided on the substrate and located around a periphery of the first electrode; and a second electrode provided above the first electrode and movable, and comprising a second one end portion corresponding to the first one end portion and a second other end portion corresponding to the first other end portion, the second one end portion extending outside the first one end portion and comprising a first bent portion bent downward. |
| 地址 |
Tokyo JP |
