| 摘要 |
A micro-electro-mechanical device detects angular velocity, for example relating to a three axis gyroscope. The three axis gyroscope includes a two axis gyroscope structure and a one axis gyroscope structure. The gyroscope further includes a lever spring system coupling a linear drive mode oscillation of the two axis gyroscope structure and a linear drive mode oscillation of the one axis gyroscope structure into one combined primary motion. The lever spring system causes the one and two axis gyroscope structures to have equal drive mode oscillation amplitudes. A symmetrical arrangement of the lever spring system causes any reactive forces created in the lever spring system to cancel each other. |
