Photodetector with surface plasmon resonance

摘要

Methods and structures for providing single-color or multi-color photo-detectors leveraging plasmon resonance for performance benefits. In one example, a radiation detector includes a semiconductor absorber layer having a first electrical conductivity type and an energy bandgap responsive to radiation in a first spectral region, a semiconductor collector layer coupled to the absorber layer and having a second electrical conductivity type, and a plasmonic resonator coupled to the collector layer and having a periodic structure including a plurality of features arranged in a regularly repeating pattern.

主权项

1. A radiation detector comprising:
a semiconductor absorber layer having a first electrical conductivity type and an energy bandgap responsive to radiation in a first spectral region, the first electrical conductivity type being one of n-type and p-type, the semiconductor absorber layer having a thickness approximately equal to a depletion width of the radiation detector; a semiconductor collector layer having the first electrical conductivity type; a plasmonic resonator abutting a top surface of the semiconductor collector layer and having a grating structure including a plurality of ridges arranged in a regularly repeating pattern, the plasmonic resonator being configured to focus the radiation in the first spectral region into the semiconductor absorber layer; and a barrier positioned between the semiconductor absorber layer and the semiconductor collector layer and physically separating the semiconductor absorber layer from the semiconductor collector layer.