| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas conversion system which is inexpensive, has expandability, and in which a system down time is short.SOLUTION: A gas conversion system (1) using a microwave plasma comprises: an inflow gas manifold (51); plural gas conversion units connected to the inflow gas manifold; and an outflow gas manifold (52) connected to the plural gas conversion units. Each of the plural gas conversion units comprises: a microwave waveguide (24); a gas flow pipe (26) passing through the microwave waveguide; first temperature control means (241) for controlling temperature of the microwave waveguide; a temperature sensor (29) for measuring temperature of the microwave waveguide; a generator (28) for generating a plasma in the gas flow pipe, and converting gas in which the plasma flows in the gas flow pipe during operation; and a plasma detector (30) attached to at least one of the microwave waveguide and the gas flow pipe, and monitoring the plasma.SELECTED DRAWING: Figure 3A |
