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发明名称
HANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JPS5199470(A)
申请公布日期
1976.09.02
申请号
JP19750024273
申请日期
1975.02.27
申请人
SHINNIPPON DENKI KK
发明人
HOSHINO MASAHIRO;TANAKA TOSHIO;HIRAKAWA KENJI
分类号
C30B31/16;H01L21/22;H01L21/223
主分类号
C30B31/16
代理机构
代理人
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