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发明名称
PROCEDE ET APPAREIL DE FORMATION DE COUCHES MONOCRISTALLINES
摘要
申请公布号
FR2317005(A1)
申请公布日期
1977.02.04
申请号
FR19760020782
申请日期
1976.07.07
申请人
ICT INC
发明人
分类号
C30B19/00;C30B11/00;C30B29/06;H01L21/208;H01L31/068;H01L31/18
主分类号
C30B19/00
代理机构
代理人
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地址
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