发明名称 PRODUCTION OF SEMICONDUCTOR ELEMENT
摘要 <p>PURPOSE:The process for production of a semiconductor element wherein the deviation in electrode patterns after honing is eliminated by registering and attaching a steel plate to a wafer after the wafer is fixed to a fixing base.</p>
申请公布号 JPS5260565(A) 申请公布日期 1977.05.19
申请号 JP19750136723 申请日期 1975.11.13
申请人 NIPPON ELECTRIC CO 发明人 NOZAKI SEISUKE
分类号 H01L21/301;H01L21/78 主分类号 H01L21/301
代理机构 代理人
主权项
地址