SELECTIVE ETCHING METHOD OF THERMOSETTING ORGANIC MATERIALS,申请号JP19760019979-传众专利搜索

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发明名称	SELECTIVE ETCHING METHOD OF THERMOSETTING ORGANIC MATERIALS
摘要
申请公布号	JPS52104066(A)	申请公布日期	1977.09.01
申请号	JP19760019979	申请日期	1976.02.27
申请人	HITACHI LTD	发明人	SAKAMOTO ISAO
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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