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经营范围
发明名称
ETCHING DEVICE
摘要
申请公布号
JPS52126177(A)
申请公布日期
1977.10.22
申请号
JP19760042790
申请日期
1976.04.15
申请人
HITACHI LTD
发明人
SUZUKI KEIZOU;OKUDAIRA SADAYUKI;KAMATA ICHIROU
分类号
H01L21/302;B01J19/08;B23K15/00;C23F4/00;H01J37/305;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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