Component for a Radiation Source, Associated Radiation Source and Lithographic Apparatus

摘要

Disclosed is component for a radiation source, said radiation source being operable to generate radiation from a fuel, said component having a surface comprising a plurality of first regions that have a high wettability by said fuel, separated by second regions which have a low wettability by said fuel. Said component may comprise a screening element for a droplet generator or contamination trap, for example.

主权项

1. A component for a radiation source, said radiation source being operable to generate radiation from a fuel, such as liquid tin, the component comprising: at least one surface comprising a plurality of first regions that have a high wettability for the fuel, wherein the plurality of first regions are separated by second regions that have a low wettability for the fuel.