Microelectromechanical device with signal routing through a protective cap

摘要

A microelectromechanical device includes: a body accommodating a microelectromechanical structure; and a cap bonded to the body and electrically coupled to the microelectromechanical structure through conductive bonding regions. The cap including a selection module, which has first selection terminals coupled to the microelectromechanical structure, second selection terminals, and at least one control terminal, and which can be controlled through the control terminal to couple the second selection terminals to respective first selection terminals according, selectively, to one of a plurality of coupling configurations corresponding to respective operating conditions.

主权项

1. A microelectromechanical device, comprising:
a body including a microelectromechanical structure, the microelectromechanical structure including a plurality of output terminals configured to provide respective output signals; conductive bonding regions; a cap bonded to the body and electrically coupled to the microelectromechanical structure through the conductive bonding regions, the cap including:
a selection module having:first selection terminals coupled to respective ones of the plurality of output terminals of the microelectromechanical structure;a second selection terminal; anda control terminal configured to selectively couple one of the first selection terminals to the second selection terminal in accordance with one of a plurality of coupling configurations corresponding to respective operating conditions.