发明名称 |
GAS PHASE REACTI APPARATUS |
摘要 |
PURPOSE:To make accumulate and adhere the reaction product having a good uniformity of the film thickness and film property with a good reproducibility, by managing so that the reaction gas and the subject to be formed may not contact for the second time by spraying the nonreactive gas separately, when the reaction gas is ejected to the subject to be formed in the bell jar. |
申请公布号 |
JPS5350075(A) |
申请公布日期 |
1978.05.08 |
申请号 |
JP19760125767 |
申请日期 |
1976.10.19 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
NISHIKAWA ATSUO |
分类号 |
C30B25/14;B01J12/00;B01J12/02;C23C16/44;C23C16/455;H01L21/205 |
主分类号 |
C30B25/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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